The innovative white light interferometers from Micro-Epsilon are used for high-precision distance and thickness measurement with a sub-nanometer resolution offering an absolute measuring range of 2.1 mm. The compact and robust sensors are ideal for integration in confined spaces. The controller has an active temperature control, which compensates for changes in the ambient temperature and thus achieves an enormous temperature stability.


  • Absolute distance measurement with nanometer accuracy
  • Distance-independent thickness measurements
  • Best-in-class: Resolution < 30 picometers
  • Industry optimized sensors with robust metal housing and flexible cables
  • Sensors and cables suitable for vacuum

The portfolio comprises three different interferometer versions intended for different fields of applications.

The high precision IMS5400-TH is used for thickness measurements of thin transparent materials. The measurement is performed using just a single sensor regardless of the distance from the measurement object which tolerates fluttering or moving measurement objects. The near-infrared light source also enables thickness measurements of anti-reflective coated glass.

The IMS5400-DS is used for industrial distance measurements. The measuring system provides absolute measurement values and detects, for example, steps and edges reliably without signal loss. These compact and robust sensors can be integrated in restricted installation spaces.

The IMS5600-DS is designed for distance measurements in clean rooms and vacuum environments (up to UHV). Special controller calibration enables subnanometer resolution, which is required, for example, when aligning a sensor or positioning a stage.

Numerous analog and digital interfaces such as Ethernet and EtherCAT enable easy connection. Configuration is performed via a user-friendly web interface for initial operation and parameter setting.