PI (Physik Instrumente) LP has introduced a new high precision linear translation stage family for high vacuum and ultra high vacuum applications. The L-509 vacuum stage series is offered for three different vacuum levels: 10-6 hPa, 10-7 hPa and 10-9 hPa.

Linear motion travel ranges of 26 mm, 52 mm and 102 mm are available. The precision-ground ball screw and high resolution motors allow sub-micrometer resolution with excellent position repeatability up to 0.1 microns.Source: PI (Physik Instrumente) LP

These motorized, vacuum compatible linear stages are based on a special, stress-relieved aluminum base and driven by a precision ground ballscrew. Only vacuum compatible components are used in the design and manufacture of the linear stages, for example, special types of plastic to allow bake-out temperatures of 250° F (~120° C) for the closed-loop system with position feedback encoder, and 300° F (~150° C) for the open loop stepper-motor driven version recommended for UHV up to 7.5 x 10-10 Torr (10-9hPa).